Applications
Semi-conductor: Spring-Energized Seals Applications
Description
In semi-conductor applications where purity and sterilization are valuable, Omniseal® spring-energized seals maintain resilience and sealing force in aggressive media at extremely high and low temperatures, speeds, and pressures. This solution ensures that the industry's stringent requirements are consistently taken care of.
Polymer Seals for Semiconductor Equipment
More Information
Temperature:
Pressure:
Chemical Compatibility:
Groove Adaptations:
Radial/Face Sealing:
Movement:
From -254°C to 365°C (-425°F to 690°F)
From UHV to 2068 bar
Broad range
Adapted to almost any type of groove
Depending on the application, these seals can be used for both radial and face sealing
Movement can be reciprocating/rotary and/or static/slow angular.
Applications include:
- Reciprocating/rotary motion (APS, 400A)
- Static, Slow Angular Motion (103A, RACO®)
- Cryogenic (103A, RACO®)
- Ultra High Vacuum (RACO®)
- Small size (APS)
- Low friction (APS)
- Back pressure (400A)
- High Temperature (400A)
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Case Studies
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